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首页> 外文期刊>Journal of Microscopy >Nano-patterning photosensitive polymers using local field enhancement at the end of apertureless SNOM tips
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Nano-patterning photosensitive polymers using local field enhancement at the end of apertureless SNOM tips

机译:在无孔SNOM末端使用局部场增强技术对感光聚合物进行纳米构图

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We show experimentally that local optical field enhancement can occur at the end of an apertureless SNOM tip illuminated by an external light source. Our approach consists in the use of a photosensitive polymer, placed in the tip near-field, to record intensity distribution in the vicinity of the tip end. The excited nanometre-size light source permits us to produce nano-patterns on the polymer surface which are then characterized by atomic force microscopy. Experimental images show the influence, on the field enhancement, of three important experimental parameters: the polarization state of the incident light, the geometry of the external illumination and the radius of curvature of the tip apex. These results are shown to be in good agreement with two-dimensional numerical calculations based on the finite-difference time-domain method. We show preliminary nanometre-size patterns created by this nano-source excited at a metallic tip extremity and discuss the potential of this approach for near-field optical lithography. [References: 24]
机译:我们通过实验表明,局部光场增强可发生在由外部光源照亮的无孔SNOM尖端的末端。我们的方法包括使用光敏聚合物,将其放置在尖端近场中,以记录尖端附近的强度分布。激发的纳米级光源使我们能够在聚合物表面产生纳米图案,然后通过原子力显微镜对其进行表征。实验图像显示了三个重要实验参数对场增强的影响:入射光的偏振状态,外部照明的几何形状以及尖端顶点的曲率半径。这些结果表明与基于有限差分时域方法的二维数值计算非常吻合。我们展示了由这种在纳米尖端激发的纳米源产生的纳米级初步图案,并讨论了这种方法在近场光学光刻中的潜力。 [参考:24]

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