Anchor-free NEMS non-volatile memory cell for harsh environment data storage

摘要

This work demonstrates a novel anchor-free nano-electromechanical (NEMS) based nonvolatile memory cell, suitable for high temperature (T ≤ 300℃) and radiation prone harsh environment applications. The anchor-free circular metal beam is actuated by electrostatic force and is held in one of the bi-stable memory states by adhesion force between two smooth metal surfaces in contact. Smooth metal layers form strong van der Waals stiction between two surfaces in contact and memory detection (Logic-'1'/Logic-'0') is obtained by detecting the conductance between two fixed contacts. This anchor-free design offers highest density (9F~2 footprint) compared to other mechanical memory devices reported to date.