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首页> 外文期刊>Journal of Micromechanics and Microengineering >A novel stretchable micro-electrode array (SMEA) design for directional stretching of cells
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A novel stretchable micro-electrode array (SMEA) design for directional stretching of cells

机译:用于细胞定向拉伸的新型可拉伸微电极阵列(SMEA)设计

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Stretchable micro-electrode arrays (SMEAs) are useful tools to study the electrophysiology of living cells seeded on the devices under mechanical stimulation. For such applications, the SMEAs are used as cell culture substrates; therefore, the surface topography and mechanical properties of the devices should be minimally affected by the embedded stretchable electrical interconnects. In this paper, a novel design and micro-fabrication technology for a pneumatically actuated SMEA are presented to achieve stretchability with minimal surface area dedicated to the electrical interconnects and a well-defined surface strain distribution combined with integrated diverse micro-patterns to enable alignment and directional stretching of cells. The special mechanical design also enables the SMEA to have a prolonged electro-mechanical fatigue life time required for long-term cyclic stretching of the cell cultures (stable resistance of electrical interconnects for more than 160 thousand cycles of 20% stretching and relaxing). The proposed fabrication method is based on the state of the art micro-fabrication techniques and materials and circumvents the processing problems associated with using unconventional methods and materials to fabricate stretchable electrode arrays. The electrochemical impedance spectroscopy characterization of the SMEA shows 4.5 MΩ impedance magnitude at 1 kHz for a TiN electrode 12 um in diameter. Cell culture experiments demonstrate the robustness of the SMEAs for long-term culturing experiments and compatibility with inverted fluorescent microscopy.
机译:可伸展的微电极阵列(SMEA)是有用的工具,用于研究在机械刺激下植入设备的活细胞的电生理。对于此类应用,将SMEA用作细胞培养底物;因此,设备的表面形貌和机械性能应受嵌入式可拉伸电互连的影响最小。在本文中,提出了一种用于气动SMEA的新颖设计和微细加工技术,以实现可拉伸性,专用于电气互连的最小表面积,良好定义的表面应变分布以及集成的多种微细图案,从而实现对齐和定位。细胞的定向拉伸。特殊的机械设计还使SMEA能够延长细胞培养物的长期循环拉伸所需的机电疲劳寿命(电互连的稳定电阻超过16万次循环,拉伸和松弛率为20%)。所提出的制造方法基于最新的微制造技术和材料,并规避了与使用非常规方法和材料制造可拉伸电极阵列相关的处理问题。 SMEA的电化学阻抗谱表征显示,直径为12 um的TiN电极在1 kHz时阻抗值为4.5MΩ。细胞培养实验证明了SMEA对于长期培养实验的稳健性以及与倒置荧光显微镜的兼容性。

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