Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback

摘要

As mechanical end-effectors, microgrippers enable the pick - transport - place of micrometer-sized objects, such as manipulation and positioning of biological cells in an aqueous environment. This paper reports on a monolithic MEMS-based microgripper with integrated force feedback along two axes and presents the first demonstration of force-controlled micro-grasping at the nanonewton force level. The system manipulates highly deformable biomaterials (porcine interstitial cells) in an aqueous environment using a microgripper that integrates a V-beam electrothermal microactuator and two capacitive force sensors, one for contact detection (force resolution: 38.5 nN) and the other for gripping force measurements (force resolution: 19.9 nN). The MEMS-based microgripper and the force control system experimentally demonstrate the capability of rapid contact detection and reliable force-controlled micrograsping to accommodate variations in size and mechanical properties of objects with a high reproducibility.