Development of a multiple-microhole aerostatic air bearing system

摘要

New types of aerostatic air bearing and linear slide systems have been developed. The prototype of a multiple-microhole, instead of a porous-type, air bearing was developed and the surface roughness was improved by finished process. Instead of the conventional drilling process, the air bearing pads were fabricated by using microfabrication technology in this research. The spectral element method was employed to simulate the pressure distribution of air bearing and a comparison was made with experimental results. A granite straight edge was used as linear slide to guide the moving table that was supported by the developed air bearing system. A laser interferometer system was used to assess the performance of the stage. [References: 14]