Field emission studies of diamond-like films grown by RFCVD

摘要

Hydrogenated amorphous carbon films (a-C:H) prepared by radio-frequency plasma-enhanced chemical vapor deposition are expected to have practical uses in electro-optics devices. The exceptionally low electron work function makes it a promising material for uses in field emission devices. This work demonstrated that hydrogen gas annealed and boron-doped diamond-like films deposited on gold silicide surfaces increase the field emission efficiency greatly. (C) 2000 Published by Elsevier Science B.V. All rights reserved. [References: 21]