Fabrication of 3D hexagonal bottle-like Si-SnO2 core-shell nanorod arrays as anode material in on chip micro-lithium-ion-batteries

摘要

Three-dimensional (3D) Si-SnO2 composite core-shell nanorod arrays were fabricated as the anode material in lithium ion micro-batteries by nanosphere lithography (NSL) combined with inductive coupled plasma (ICP) dry etching technology. The hexagonal bottle-like Si NR arrays in wafer scale with homogeneous morphology and good mechanical structure provide enough space to accommodate the volume expansion during Li ion insertion/de-insertion processes, while the additionally deposited SnO2 thin film was prepared to successfully improve the capacities and cycle performance by configuring the 3D Si-SnO2 NR composite electrode arrays. This fabrication method has the advantages of simplicity, large scale production, easy size and shape manipulations, low cost and Si-process compatibility. This work will facilitate the configuration of solid state micro-batteries for power supply in micro-electronic devices, such as MEM5 devices or smart iC chips.