Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO_2-SiC horizontal slot waveguides

摘要

We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO_2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB/cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in the slot. This simulation revealed that SiC-based slot waveguides can be used, advantangeously, for sensing as the confinement strongly varies with the refractive index of the slot material. A confinement factor change of 0.15/refractive index units was measured for different slot materials.