A practical method for simultaneous determination of Poisson's ratio and Young's modulus of elasticity of thin films

摘要

In this paper, based on the exact analytical solution of axisymmetric deformation of the circular membrane fixed at its edge under the action of uniformly-distributed loads, we propose a new method to be able to simultaneously determine Poisson's ratio and Young's modulus of elasticity for thin films. We also present a set of exact formulas used for simultaneously determining Poisson's ratio and Young's modulus of elasticity for free-standing thin films or coating thin films without residual stresses or pre-tension. This method has the advantages of simplicity and reliability, and it doesn't involve the substrate effect.