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首页> 外文期刊>Journal of Materials Science >TRANSMISSION ELECTRON MICROSCOPIC INVESTIGATIONS ON SIC- AND BN-COATED CARBON FIBRES
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TRANSMISSION ELECTRON MICROSCOPIC INVESTIGATIONS ON SIC- AND BN-COATED CARBON FIBRES

机译:SIC和BN涂层碳纤维的透射电子显微镜研究

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摘要

Carbon fibres were coated with layers of silicon carbide (SIG) and boron nitride (BN) by conventional chemical vapour deposition. The SiC films were deposited by thermal decomposition of methyltrichlorosilane, whereas the BN films were deposited using the stepwise disproportion reaction of boron chloride with ammonia. Samples for electron microscopic investigations were prepared by separating film from fibre or by conventional mechanical thinning and subsequent ion milling of cross sections of coated fibres. Bright- and dark-field images of both planar and cross-sectional electron microscopic investigations on the fibre coatings gave detailed information on film thickness and morphology. High-resolution images improved the structural information of electron diffraction patterns. Crystal dimensions in the SiC film vary between 10 and 40 nm. Electron diffraction revealed the crystal structure to be a mixture of disordered hexagonal 2H-SiC and cubic beta-SiC. High-resolution images showed the (111)-planes to be preferred for deposition. In BN films, a hexagonal turbostratic structure similar to turbostratic carbon was observed. Apart from amorphous regions, nanocrystalline parts were detected, which have a higher structural perfection in the stacking sequence of their (002)-planes compared to the (002)-planes of the turbostratic carbon fibre. High-resolution images located the film-fibre interface that was confirmed by electron energy loss spectroscopy. [References: 12]
机译:碳纤维通过常规化学气相沉积法涂覆有碳化硅(SIG)和氮化硼(BN)层。通过甲基三氯硅烷的热分解来沉积SiC膜,而使用氯化硼与氨的逐步歧化反应来沉积BN膜。用于电子显微镜研究的样品是通过从纤维上分离薄膜或通过常规的机械稀化以及随后对涂层纤维横截面进行离子铣削而制备的。在纤维涂层上进行的平面和截面电子显微镜研究的明场和暗场图像都给出了有关膜厚和形貌的详细信息。高分辨率图像改善了电子衍射图的结构信息。 SiC膜中的晶体尺寸在10到40 nm之间变化。电子衍射显示晶体结构是无序六方2H-SiC和立方β-SiC的混合物。高分辨率图像显示(111)平面更适合沉积。在BN膜中,观察到类似于涡轮层碳的六边形涡轮层结构。除了非晶区以外,还检测到纳米晶零件,与涡轮层碳纤维的(002)平面相比,纳米晶零件在其(002)平面的堆叠顺序中具有更高的结构完美度。高分辨率图像位于薄膜-纤维界面,该界面已通过电子能量损失光谱法确认。 [参考:12]

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