Applications of electrostatic spray techniques to surface cleaning

摘要

Conventional cleaning technologies have been effective in removal of particles, metals, and organicfilms. However, two trends motivating the development of new techniques are 1) the desire tominimize the environmental impact of large volumes of cleaning solutions; and 2) the need to cleanat the sub-45 nm level, consistent with decreasing feature sizes. We report here on the initialcharacterization of a system to apply electrospray techniques to variants of the SC-1 and SC-2solutions, as well as to solvent mixtures. We describe the generation of submicron sized droplets(<1 um radius) of cleaning mixtures and demonstrate a preliminary methodology, using acombination of experimental data and phenomenological modeling approaches, to characterize thephysics of the droplet-surface interaction.