Thermal Properties of Zirconium Oxide-Based Ceramic Targets Modified with Oxides of Rare Earth Elements

摘要

The paper is concerned with the thermal properties of cathodic ceramic targets built on the basis of zirconium oxide modified with rare earth metal oxides such as La_2O_3, Nd_2O_3, and Gd_2O_3. The experiments also included the production of the TZ-3Y, TZ-3Y+20mol% coatings (La_2O_3, Gd_2O_3) using the EB-PVD method, and characterization of these coatings. Within the temperature range examined (20 to 120°C), the targets that contained rare earth metal oxides appeared to have lower thermal conductivity X (2.07-1.22 Wm~(-1)K~(-1)) than the TZ-3Y target (3.6-3.05 Wm~(-1)K~(-1)). The present study was a continuation of our earlier experiments devoted to the examinations of zirconium oxide ceramic targets intended for producing refractory, heat-resistant nanocrystalline coatings.