Influence of Deposition Parameters on The Properties of Nanocomposite Coatings Prepared by Cathodic Arc Evaporation

摘要

The article deals with the influence of different deposition parameters on the selected properties of AICrN/Si_3N_4 nanocomposite coatings. Bias voltage, cathodes currents and working gas pressure were changed during the deposition process. All coatings were deposited using Lateral Rotating Cathodes (LARC~?) process that belongs to the group of cathodic arc evaporation PVD technologies. In comparison with the typical cathodic arc evaporation process which usually uses planar targets the LARC~? process utilizes rotational cathodes that are positioned close to each other. Nanohardness, Young's modulus, thickness and residual stresses were determinated in order to evaluate the influence of deposition parameters on these coatings properties.