EBIC/XPS Study of Antimony Equilibrium Segregation at the Germanium Surface

摘要

The equilibrium segregation of antimony at Ge surface was investigated using X-ray Photoelectron Spectroscopy (XPS) and Electron Beam Induced Current (EBIC) techniques. XPS spectra showed a progressive shift of the germanium lines towards the high binding energies as the duration of the segregation treatment increases. The shift was related to the band bending in the surface region resulting from a high density of surface states. EBIC observations revealed islands of bright contrast covering few micron distance below the surface. The contrast was related to the increase of the depletion region width of the Schottky contact as a result of the dopant segregation.