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首页> 外文期刊>Journal of Electronic Materials >Four-Wire Resistance Measurements of a Bismuth Nanowire Encased in a Quartz Template Utilizing Focused Ion Beam Processing
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Four-Wire Resistance Measurements of a Bismuth Nanowire Encased in a Quartz Template Utilizing Focused Ion Beam Processing

机译:利用聚焦离子束处理的石英模板中铋纳米线的四线电阻测量

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Four-wire resistance measurements were performed using a bismuth nanowire, 750 nm in diameter, 1.96 mm in length, and encapsulated in a quartz template. One side of the quartz template was polished to allow focused ion beam (FIB) processing, and metal film layers were deposited on the polished side to form electrodes. Nanofabrication was employed to remove a selected portion of the quartz, and FIB processing was used to expose the surface of the bismuth nanowire. A local area of the bismuth wire was successfully exposed, and a carbon electrode was deposited on the bismuth wire in situ by a chemical reaction between the ion beam and phenanthrene gas. Additional carbon deposition on the initial carbon electrode was used to connect to a metal film on the quartz template. In total, four nanofabrications were performed on the bismuth wire to create the desired electrical contacts. The resistivity of the nanowire was measured by a four-wire method to be 1.29 (mu)(OMEGA) m at 300 K, corresponding to that of bulk bismuth. The temperature dependence of the resistivity was also measured, and was qualitatively and quantitatively in good agreement with previous calculated and experimental results using other bismuth nanowires. The present results demonstrate the successful development of a technique to fabricate an electrode on a local area of a nanowire using FIB processing to form suitable electrical contacts.
机译:使用直径为750 nm,长度为1.96 mm的铋纳米线并封装在石英模板中进行四线电阻测量。石英模板的一侧被抛光以允许聚焦离子束(FIB)处理,并且金属膜层沉积在抛光侧上以形成电极。纳米加工用于去除石英的选定部分,FIB工艺用于暴露铋纳米线的表面。成功地暴露了铋丝的局部区域,并且通过离子束和菲气体之间的化学反应将碳电极原位沉积在铋丝上。初始碳电极上的其他碳沉积用于连接至石英模板上的金属膜。总共在铋线上进行了四个纳米加工,以创建所需的电触点。通过四线法测得的纳米线的电阻率在300K下为1.29μ(OMEGA)m,对应于体铋的电阻率。还测量了电阻率的温度依赖性,并且定性和定量地与使用其他铋纳米线的先前计算和实验结果相吻合。本结果证明了使用FIB处理形成合适的电触点在纳米线的局部区域上制造电极的技术的成功开发。

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