Adhesion of copper to poly(tetrafluoroethylene-co-hexafluoropropylene)(FEP)surfaces modified by vacuum UV photo-oxidation downstream from Ar microwave plasma

摘要

Poly(tetrafluoroethylene-co-hexafluoropropylene)(FEP)surfaces were exposed to vacuum UV(VUV)photo-oxidation downstream from Ar microwave plasma.The modified surfaces showed the following:(1)an improvement in wettability as observed by water contact angle measurements;(2)surface roughening;(3)defluorination of the surface;and(4)incorporation of oxygen as CF-O-CF_2,CF_2-O-CF_2 and CF-O-CF_3 moieties.With long treatment times,a cohesive failure of copper sputter-coated onto the modified surface occurred within the modified FEP and not at the Cu-FEP interface.