Nouvelles applications de la spectrometrie d'emission X induite par excitation electronique de basse energie (LEEIXS) en analyse de surface

摘要

This paper recalls the basic principles of low-energy electron induced x-ray spectrometry (LEEIXS), a wavelength dispersive technique using an electron beam generated in a glow discharge system as an excitation source. Capabilities of this soft and ultra-soft x-ray emission technique in surface and thin film analysis are illustrated by examples dealing with characterization of (i) silane films chemically adsorbed in liquid phase on stainless steel substrates, (ii) self-organized thiol layers of various saturated hydrocarbon chain-lengths also grafted in liquid phase on gold substrates, (iii) amorphous hydrogenated carbon (a:C-H) films deposited by a PACVD process on stainless steel substrates. In addition, the effect of a plasma treatment carried out in various gases (He, Ar, NH3,02) on the mechanical and/or chemical ablation of amorphous hydrogenated carbon films is shown.