Preparation of High-Purity Monoisotopic Silane:~(28)SiH_4,~(29)SiH_4,and ~(30)SiH_4

摘要

Considerable recent attention ha been focused on stduying the methods of preparation and properties of isotope-enriched substances [1].Monoisotopic semiconducting materials,especially silicon,have stimulated special interest.A preferred method for obtaining high-purity silicon is the hydride method,involving the synthesis of a volatile silicon hydride,monosilane,and its thermal decomposition [2].Silane is used for producing both compact samples [3]and semiconducting layers of silicon [4].