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Thin-film heteroepitaxy by the formation of the dilatation dipole ensemble

机译:薄膜异质外延通过形成扩张偶极子系

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摘要

It is shown that in substantially anisotropic media, such as a crystal with cubic lattice symmetry, the analogous dilatation centers can strongly attract each other considerably decreasing the total elastic energy. Such attractive centers form stable objects of a new type, the elastic dilatation dipoles. By the example of heteroepitaxy of the film of silicon carbide SiC on a silicon substrate, the calculations of elastic energy of the system are performed. It is shown that the elastic energy can relax completely only due to the ensemble of dilatation dipoles. A new growth method of SiC on Si is suggested and implemented experimentally. In this method, the elastic energy relaxes due to the ensemble of elastic dilatation dipoles. It is shown experimentally that the heteroepitaxial SiC films grown do not contain cracks and lattice-misfit dislocations despite the tre- mendous difference in lattice parameters. Thick low-defect GaN and AlN layers are grown on the SiC/Si templates obtained. The laboratory model of the operating light-emitting diode is originally obtained based on these structures.
机译:结果表明,在基本上各向异性的介质中,例如具有立方晶格对称性的晶体,类似的膨胀中心可以相互强烈吸引,从而大大降低了总弹性能。这种吸引人的中心形成一种新型的稳定物体,即弹性膨胀偶极子。以硅衬底上的碳化硅SiC膜的异质外延为例,进行了系统的弹性能的计算。结果表明,仅由于扩张偶极子的结合,弹性能才能完全松弛。提出并实验实现了一种新的SiC在Si上生长的方法。在该方法中,由于弹性膨胀偶极子的集合,弹性能松弛。实验表明,尽管晶格参数存在巨大差异,但生长的异质外延SiC薄膜不包含裂纹和晶格失配位错。在获得的SiC / Si模板上生长厚的低缺陷GaN和AlN层。基于这些结构,最初获得了工作发光二极管的实验室模型。

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