Comparision of field electron emission from DLC films produced by four different deposition techniques

摘要

Diamond-like carbon (DLC) films produced by ion beam, laser-arc, r.f.-plasma deposition andmagnetron sputtering were characterized on the field electron emission properties (thresholds,hysteresis behaviour, stability, homogeneity). The best samples showed electron emission at fields of4-20 Vμm{sup}-1. Correlations between emission properties and film hardness, Raman spectra,optical band gap, sp{sup}3-bonded carbon content and electroconductivity were found. A speciallydesigned high vacuum scanning tunneling-field emission microscope was used for simultaneousmapping of film morphology, work function and local field emission intensity. Correlations wereobserved between emission centres location and work function minima. Factors that improve thefield electron emission from DLC films are discussed.