Enhancement of the electrophotographic properties of DLC coated OPC drums by oxygen addition

摘要

Diamond-like carbon films with high transmittance over 90% and hardness substantially higher than that of a organic photoconductor (OPC) were deposited on OPC layers using a d.c.-remote plasma enhancement chemical vapor deposition (RPECVD) system with a magnetic field imposed around the cathode. All the electrophotographic properties except residual potential were enhanced by DLC coating. The hardness and resistivity of the DLC film were also improved by adding oxygen to CH_4 gas. However, the residual potential value can be reduced to 11.0 V which is acceptable even for high sensitivity laser printing, by using a CH_4-20at.% O_2 gas mixture in the RPECVD for DLC coating.