Surface engineering of diamond tips for improved field electron emission

摘要

Results are reported on the study of surface engineering of diamond microtips for improved field electron emission. Two-dimensional (2D) arrays of diamond pyramids were prepared using a molding technique. As-grown diamond pyramids of 3 and 9 #mu#m in size with sharp apexes were insulating and showed a relatively poor field electron emission. Several ways are examined to provide an electrical conductivity of diamond in order to supply electrons for the emission: diamond boron doping, partial graphitization/amorphization by nitrogen ion implantation and/or high temperature annealing, formation of built-in conductivc metal layers. A perceptible improvement of surface electrical conductivity and reduction of field electron emission threshold' down to 10 V/#mu#m was observed. For explanation of the results it was enough to take into account only the geometric field enhancement on pyramids apexes.