首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >TWO-DIMENSIONAL MEASUREMENTS OF THIN FILM EROSION AND DEPOSITION BY COLORIMETRY OF INTERFERENCE COLORS AND ITS APPLICATION IN FUSION DEVICES
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TWO-DIMENSIONAL MEASUREMENTS OF THIN FILM EROSION AND DEPOSITION BY COLORIMETRY OF INTERFERENCE COLORS AND ITS APPLICATION IN FUSION DEVICES

机译:干涉色的比色法二维测量薄膜腐蚀与沉积及其在熔融装置中的应用

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摘要

The paper describes time resolved observations of the erosion of a thin (approximate to 105 nm) and transparent a-B:D film on a roof-like graphite test probe (60 mm x 63 mm) in the scrape-off layer plasma of the tokamak TEXTOR-94. Steady state of the erosion pattern was almost achieved after 22 discharges (121.3 s total exposure time). After each of the pulses the interference color pattern in illuminating light of 3200 K color temperature was observed by means of conventional video technique and the color coordinates R, G, B measured. Since they can be related uniquely to the film thickness contour maps and profiles could be evaluated and erosion rates determined. Net deposition on parts of the surface is also observed. Most of the results can be described by erosion due to the hydrogen flux and the simultaneous deposition of carbon and other impurities from the background plasma. The deposition of impurities onto the a-B:D bulk seems to reduce the erosion rates which prolongs its lifetime. This interpretation is backed by AES and NRA analysis of the boron content and by EPMA. Copyright (C) 1996 Elsevier Science Ltd. [References: 24]
机译:该论文描述了时间分辨的观察结果,表明在托卡马克TEXTOR的刮除层等离子体中,屋顶状石墨测试探针(60 mm x 63 mm)上的薄aB:D薄膜(约105 nm)和透明aB:D膜受到腐蚀。 -94。 22次放电(总暴露时间为121.3 s)后,侵蚀模式几乎达到了稳态。在每个脉冲之后,通过常规视频技术观察3200K色温的照明光中的干涉色图案,并测量色坐标R,G,B。由于它们可以与薄膜厚度唯一相关,因此可以评估轮廓图和轮廓并确定腐蚀速率。还观察到在部分表面上的净沉积。大部分结果可以通过氢通量的侵蚀以及背景等离子体中碳和其他杂质的同时沉积来描述。杂质在a-B:D块状物上的沉积似乎降低了腐蚀速率,从而延长了其寿命。 AES和NRA对硼含量的分析以及EPMA支持这种解释。版权所有(C)1996 Elsevier Science Ltd. [参考:24]

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