首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Influence of different vacuum conditions on the distribution of insoluble inclusions in a multi-crystalline silicon ingot
【24h】

Influence of different vacuum conditions on the distribution of insoluble inclusions in a multi-crystalline silicon ingot

机译:不同真空条件对多晶硅锭中不溶夹杂物分布的影响

获取原文
获取原文并翻译 | 示例
           

摘要

The distribution of insoluble inclusions in multi-crystalline (m-c) silicon was investigated by directional solidification under different vacuum conditions using recycled scraps. We found an abnormal peak (weight ratio of 1.19%) of SiC and Si3N4 with an average size of 100 gm located at the bottom of the silicon ingot obtained under low-vacuum conditions. At the top of the ingot, the impurity phase featured a weight ratio exceeding 10.62% and a size of 20 mu m. Results showed that large particles sank to the bottom of the ingots whereas small particles floated upward. Further investigation suggested that the dominant factor influencing inclusion distribution is related to the presence of metallic impurities (e.g., Ca, Al, and Na) and their corresponding microstructure. A mechanism of migration was proposed to reveal that bonding of metallic impurities and insoluble inclusions contribute to the abnormal distribution of impurities. The results provide guidance for controlling the distribution of insoluble inclusions in recycled m-c silicon. (C) 2016 Elsevier Ltd. All rights reserved.
机译:通过使用回收的废料在不同真空条件下进行定向凝固,研究了多晶(m-c)硅中不溶夹杂物的分布。我们发现,在低真空条件下,位于硅锭底部的SiC和Si3N4峰(重量比为1.19%)平均尺寸为100 gm。在晶锭的顶部,杂质相的重量比超过10.62%,尺寸为20μm。结果表明,大颗粒沉到铸锭的底部,而小颗粒向上漂浮。进一步的研究表明,影响夹杂物分布的主要因素与金属杂质(例如Ca,Al和Na)的存在及其相应的微观结构有关。提出了一种迁移机理,以揭示金属杂质和不溶性夹杂物的结合会导致杂质的异常分布。结果为控制不溶性夹杂物在回收的m-c硅中的分布提供了指导。 (C)2016 Elsevier Ltd.保留所有权利。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号