首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Catalytic growth mechanism and catalyst effects on electron field emission of nitrogenated carbon nanorods formed by plasmaenhanced hot filament chemical vapor deposition
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Catalytic growth mechanism and catalyst effects on electron field emission of nitrogenated carbon nanorods formed by plasmaenhanced hot filament chemical vapor deposition

机译:等离子体增强热丝化学气相沉积形成的氮化碳纳米棒的催化生长机理和催化剂对电子场发射的影响

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摘要

Nitrogenated carbon nanorods (NCNRs) with different structures were catalytically synthesized on the silicon substrate deposited with gold films in a plasma-enhanced hot filament chemical vapor deposition system, where methane, nitrogen and hydrogen were used as the reactive gases. The structure and composition of synthesized NCNRs were investigated by field emission scanning electron microscopy, transmission electron microscopy, micro-Raman spectroscopy and X-ray photoelectron spectroscopy, respectively. The results indicate that the gold particles locate at the tops of NCNRs composed of amorphous carbon with nitrogen incorporation and their growth was improved with the increase of nitrogen. According to the theory related to thermodynamics, the catalytic growth mechanism of NCNRs was studied. The electron field emission (EFE) properties of NCNRs were studied in a high-vacuum system of ~10~(-6) Pa. The EFE results show that the turn-on field changes from 2.26 to 3.11 V/μm for the NCNRs with different structures and the current density is up to about 2.2 mA/cm~2. The EFE results also indicate that the Fowler-Nordheim curves of NCNRs are composed of three straight lines, which are different from the FeN curve of single carbon nanorod reported. In addition, the work function of carbon nanorods was measured by X-ray photoelectron spectroscopy and the results show that the work function is closely correlated with the structure and composition of the synthesized carbon nanorods. Depending on the interface barrier formed between the NCNRs and gold particles, the effects of catalyst on the EFE properties of NCNRs were studied according to the analysis of the change in the slope of F-N curves. These results can enrich our knowledge on the structure and EFE properties of carbon nanomaterials and are highly relevant to fabrication of next generation of optoelectronic devices.
机译:在等离子体增强的热丝化学气相沉积系统中,以甲烷,氮气和氢气为反应气体,在具有金膜沉积的硅基板上催化合成了具有不同结构的氮化碳纳米棒(NCNR)。分别通过场发射扫描电子显微镜,透射电子显微镜,显微拉曼光谱和X射线光电子能谱研究了合成NCNR的结构和组成。结果表明,金颗粒位于掺有氮的无定形碳组成的NCNRs的顶部,并且随着氮的增加其生长得到改善。根据有关热力学的理论,研究了NCNRs的催化生长机理。在〜10〜(-6)Pa的高真空系统中研究了NCNRs的电子场发射特性。EFE结果表明,NCNRs的开通场从2.26 V /μm变化到3.11 V /μm。不同的结构,电流密度高达约2.2 mA / cm〜2。 EFE结果还表明,NCNR的Fowler-Nordheim曲线由3条直线组成,这与报道的单个碳纳米棒的FeN曲线不同。另外,通过X射线光电子能谱法测定了碳纳米棒的功函数,结果表明该功函数与合成的碳纳米棒的结构和组成密切相关。根据NCNRs与金​​颗粒之间形成的界面势垒,通过分析F-N曲线斜率的变化,研究了催化剂对NCNRs EFE性能的影响。这些结果可以丰富我们对碳纳米材料的结构和EFE特性的了解,并且与下一代光电器件的制造高度相关。

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