Development of a 5-axis control ultraprecision milling machine for micromachining based on non-friction servomechanisms

摘要

The study addresses the development of a 5-axis ultraprecision milling machine to create tiny 3-dimensional workpieces as well as microstructures. 3-axis control ultraprecision milling machines allow microstructures on tiny workpiece surfaces to be manufactured; however it is difficult to create 3-dimensional workpieces such as very small heads, statues etc., which will be important in micromanufacturing in the future. Thus, a 5-axis milling machine consisting of three translational and two rotational axes has been developed benefitting from the use of non-friction servomechanisms. 5-axis micromachining was conducted to create a half cylindrical workpiece. It was found that the ultraprecision milling machine is accurate enough to machine tiny 3-dimensional workpieces.