Optimum Design of MEMS-SAW Filter for Wireless System Applications

摘要

SAW devices have become increasingly important in implementing sensors, chemical and biological warfare agent detectors, resonators and wireless applications as a filter. These types of device can be implemented with micro-electro-mechanical systems (MEMS) to be compatible with CMOS technology. In this work we design RF SAW filter at different frequencies for wireless communication system applications. We focus on optimum design of Input/output IDTs number of electrodes, so the total frequency response of the SAW filter with required bandwidth can be achieved. The designed parameters of the piezoelectric substrate have been obtained from the experimental work for a fabricated multilayer substrate of ZnO/SiO{sub}2/Si using MEMS technology. Implementation of the optimized SAW filter in a wireless system is described. Simulation results are presented for different design of SAW filter for verification.