FIRST USE OF NTD GERMANIUM-BASED MICROCALORIMETERS FOR HIGH-RESOLUTION, BROADBAND X-RAY MICROANALYSIS

摘要

Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter, An energy resolution of 8 eV was used to resolve completely the silicon K alpha from the tungsten M alpha x-rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies. (C) 1997 by John Wiley & Sons, Ltd. [References: 9]