Fabrication and Characterization of an MR Cantilevers with a Spin-Valve Sensor for Scanning Magnetoresistance Microscope

摘要

We developed a new micro-fabricated cantilever with a spin-valve sensor (MR cantilever) for a scanning magentoresistance microscope (SMRM). Since the spin-valve sensor has a self-biasing mechanism, it allows the SMRM to respond to an observed magnetic field linearly without any external bias magnetic field, and it makes the SMRM more sensitive to magnetic fields. We have succeeded in introducing the self-biasing mechanism into the SMRM system by fabricating the spin-valve sensor on a cantilever.