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The influence of surface microcracks and temperature gradients on the rf plasma nitriding rate

机译:表面微裂纹和温度梯度对射频等离子体渗氮速率的影响

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摘要

Rf plasma nitriding processes have been used recently for surface treatment. 304 Austenitic stainless steel has been nitrided using an inductively coupled rf plasma. High rates of nitriding and relatively high microhardness have been achieved. The effect of plasma power and plasma processing time on the rate of nitriding and the microstructure was investigated. A high nitriding rate of 3 mum(2)/s and a microhardness value of 1800 HV0.1 were achieved under optimum plasma conditions. The interpretation is based on a new approach that the microcracks in the,surface, at a certain ambient temperature and plasma, can create traps for the active nitrogen species. The nitrogen concentration and temperature gradient can also draw some of the nitrogen species towards the bulk side. The microhardness can be explained in terms of the high concentration of nitrided phases created under the surface of the treated samples. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 22]
机译:射频等离子体氮化工艺最近已用于表面处理。 304奥氏体不锈钢已使用感应耦合射频等离子体进行了氮化处理。已经实现了高氮化率和相对高的显微硬度。研究了等离子体功率和等离子体处理时间对氮化速率和微观结构的影响。在最佳等离子体条件下,实现了3 mum(2)/ s的高氮化率和1800 HV0.1的显微硬度值。这种解释是基于一种新的方法,即在一定的环境温度和等离子体下,表面的微裂纹会为活性氮物质产生陷阱。氮浓度和温度梯度也可以将一些氮物质吸引到主体侧。可以用在处理过的样品表面下产生的高浓度氮化相来解释显微硬度。 (C)2002 Elsevier Science B.V.保留所有权利。 [参考:22]

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