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New coatings on metal sheets and strips produced using EB PVD technologies

机译:使用EB PVD技术生产的金属薄板和带材上的新涂层

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摘要

PVD coatings deposited by electron beam (EB) evaporation on large metal sheets and metal strips are discussed and have been used for many years. Recently developed plasma activated technology has opened up new potential applications. The new coatings produced by EB PVD represent an outstanding supplement to existing products. It is verified that the deposition costs are low enough in comparison to competitive technologies. Dense Ti layers are produced with high deposition rates up to 1000 nm{sup}(-1) by EB evaporation in combination with effective plasma activation by a spotless arc (SAD-process). The corrosion resistance of the coatings deposited with this SAD process and an additional bias voltage can be drastically improved in comparison to deposition without plasma activation. Aluminum oxide coatings were deposited by reactive EB evaporation at deposition rates between 50 and 100 nm s{sup}(-1). The influence of plasma activation using a hollow cathode low-voltage electron beam (HAD process) on the structure and properties of Al{sub}2O{sub}3 coatings have been investigated. It could be shown that the coatings deposited with the HAD process have a drastically increased hardness, higher density and an improved chemical stability in comparison to the coatings deposited without plasma activation. Stone-blasting resistance can be improved and good formability of galvanised steel can be maintained by a thin Fe layer. The Fe layer is deposited by high rate EB evaporation and then via a subsequent annealing process an intermetallic compound top layer is created.
机译:讨论了通过电子束(EB)蒸发在大型金属板和金属条上沉积的PVD涂层,并已使用了很多年。最近开发的等离子活化技术开辟了新的潜在应用。 EB PVD生产的新涂料是对现有产品的出色补充。已经证实,与竞争技术相比,沉积成本足够低。通过EB蒸发结合无斑点电弧的有效等离子体激活(SAD工艺),可以产生高达1000 nm {sup}(-1)的高沉积速率的致密Ti层。与没有等离子体活化的沉积相比,用此SAD工艺沉积的涂层的耐腐蚀性和附加的偏置电压可以大大提高。通过反应性EB蒸发以50到100 nm s {sup}(-1)之间的沉积速率沉积氧化铝涂层。研究了使用空心阴极低压电子束(HAD工艺)的等离子体活化对Al {sub} 2O {sub} 3涂层的结构和性能的影响。可以证明,与没有等离子体活化的沉积的涂层相比,用HAD工艺沉积的涂层具有大大增加的硬度,更高的密度和改进的化学稳定性。通过薄的Fe层可以提高抗喷砂性能,并可以保持镀锌钢的良好成形性。通过高速EB蒸发沉积Fe层,然后通过随后的退火工艺形成金属间化合物顶层。

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