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Parametric study of nitrided AISI 304 austenite stainless steel prepared by plasma immersion ion implantation

机译:等离子体浸没离子注入法制备的渗氮AISI 304奥氏体不锈钢的参数研究

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This paper investigates the characteristics of plasma immersion nitrogen-ion implanted AISI 304 austenite stainless steel against such processing parameters as bias voltage (5-20 W), substrate temperature (300-500 degrees C), and implantation fluence (1.4-10(18)-4.2-10(18) cm(-2)). Characteristics of the as-implanted specimens under investigation included elemental depth profile, hardness depth profile, crystallographic structure, and corrosion behavior and were determined using glow discharge spectrometry (GDS), the Vickers hardness tester, X-ray diffractometry (XRD), and the potentiodynamic polarization test, respectively. The results show that nitrogen depth profiles strongly depend on these processing parameters and closely relate to the corresponding chromium depth profiles. The hardness depth profiles increase and widen as substrate temperature, bias voltage, and implantation fluence increase. In particular, an improvement in hardness is accompanied by a reduction in corrosion resistance when substrate temperature reaches 500 degrees C. The corrosion-resistance degrader, CrN, precipitates as substrate temperature exceeds 450 degrees C, a phenomenon which is clearly evident in the chromium depth profiles as well as the XRD results. (c) 2006 Elsevier B.V. All rights reserved.
机译:本文针对偏压(5-20​​ W),基板温度(300-500摄氏度)和注入能量密度(1.4-10(18)等工艺参数,研究了等离子浸入氮离子注入AISI 304奥氏体不锈钢的特性。 )-4.2-10(18)cm(-2))。所研究的植入样品的特征包括元素深度分布,硬度深度分布,晶体结构和腐蚀行为,并使用辉光放电光谱仪(GDS),维氏硬度计,X射线衍射仪(XRD)和电位动力学极化试验。结果表明,氮深度分布在很大程度上取决于这些加工参数,并与相应的铬深度分布密切相关。硬度深度分布随衬底温度,偏置电压和注入通量的增加而增加和加宽。尤其是,当基板温度达到500摄氏度时,硬度的提高伴随着抗腐蚀性的降低。当基板温度超过450摄氏度时,抗腐蚀剂CrN会析出,这种现象在铬深处显而易见配置文件以及XRD结果。 (c)2006 Elsevier B.V.保留所有权利。

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