Large-scale antireflective coatings on glass produced by reactive magnetron sputtering

摘要

This paper reports on antireflective (AR) and antireflective and antistatic (ARAS) coatings on glass [in particular, on cathode ray tubes (CRTs)] manufactured by reactive sputtering employing a mid-frequency-powered dual magnetron (TwinMag). Single SiO2, TiO2 and Ta2O5 layers as well as complete ARAS systems have been prepared on flat glass and 17 in curved CRTs. The optical performance of different designs is discussed. On the basis of existing data, equipment for the coating of CRTs on an industrial scale is presented. (C) 1998 Elsevier Science S.A. [References: 3]