Characteristic studies on the Zr-based metallic glass thin film fabricated by magnetron sputtering process

摘要

The Zr61Al17.5Ni10CU17.5Si4 amorphous alloy (ZrAlNiCuSi) was selected as the target material for preparing a series of thin film coatings on the 304 stainless steel substrate by magnetron sputtering process. The microstructure of these as-prepared ZrAlNiCuSi and (ZrAlNiCuSi)N thin films were examined by X-ray diffraction and TEM observation. In Parallel, the properties characterization of these ZrAlNiCuSi and (ZrAlNiCuSi)N alloy thin films including hardness measurement by nano indentation, wetting ability by contact angle measurement. adhesion capability by scratch test, surface roughness analyzed by atomic force microscopy (AFM) and the wear resistance evaluated by pin-on disc method were investigated and compared to the commercial hard coatings. The results revealed that all of these ZrAlNiCuSi and (ZrAlNiCuSi)N thin films present a typical amorphous microstructure and smooth surface with roughness about 1 nm. This feature makes these amorphous ZrAlNiCuSi and (ZrAlNiCuSi)N thin films posses a lower wettability as well as a higher wear resistance.