Studies on synthesis of aluminium containing layer systems on steel and cermet substrates by PACVD

摘要

The deposition of aluminium containing, especially aluminium oxide coatings on steel and cermets was performed by the plasma assisted chemical vapour deposition (PACVD) process using a metallo-organic compound (AlH3.NEt3) as precursor. The usefulness of the precursor in the PACVD process was investigated. The deposition process of non-conducting aluminium oxide layers was developed by pulse d.c.-PACVD. Optical emission spectroscopy (OES) was used for in situ process control. The investigation by OES enables the identification of the species in the discharge (Al and other) and thus supports the successful process development. The structure, chemical composition, bonding types in the layers, hardness, adhesion, roughness, friction coefficient and friction behaviour by a pin on the disk test have been investigated. The layers consist of Al, O and traces of carbon using the metallo-organic precursor. The friction coefficient is > 50% less compared to an uncoated steel substrate up to the breaking through of the layer by a pin on the disk test. (C) 1998 Elsevier Science S.A. [References: 14]