Nitrogen ion implantation of silicon-containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition

摘要

Hard, adherent, and low-friction silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized by 40 keV Ar+ ion beam assisted deposition (IBAD) of tetraphenyl-tetramethyl-trisiloxane oil, on 8.90 cm (3.5 in) diameter aluminum alloy substrates. The Si-DLC coatings were implanted with nitrogen ions to doses of 3 x 10(15), 3 x 10(16), and 3 x 10(17) ions/cm(2). The Si-DLC coating synthesis and the subsequent nitrogen ion implantation at SO keV took place in a non-mass analyzed ion implanter. The thickness of the implanted coatings, measured with the aid of a profilometer, remained equal to the thickness of the unimplanted coating, and photon tunneling microscopy showed some surface roughening from the implantation process. The unlubricated steel ball-on-disk friction coefficient increased with increasing implant dose. However, the wear rate of the coating, determined with the aid of an optical microscope and a stylus profilometer, decreased with increasing implant dose. (C) 1998 Elsevier Science S.A. [References: 15]