Dynamic dispatching for interbay material handling by using modified Hungarian algorithm and fuzzy-logic-based control

摘要

Semiconductor Wafer Fabrication System (SWFS) is one of the most complicate discrete processing systems in the world. As the wafer size grows from 200 to 300 mm and then to 450 mm in recent years, the interbay automated material handling system (AMHS) has been widely adopted. How to improve the overall efficiency of interbay material handling has therefore become a critical and urgent problem to be solved. However, the large-scale, dynamic and stochastic production environment significantly substantiates the complexity of the scheduling problem. Aiming to meet the demands of adaptive adjusting, efficient scheduling and multiple-objective optimization, a dynamic dispatching method based on modified Hungarian algorithm is proposed. The system parameters, including cassette due date, cassette waiting time, and system load are simultaneously considered, and furthermore the multi-parameters' weight coefficients are adjusted dynamically by using the fuzzy-logic-based control. Discrete event simulation models are constructed with the eM-Plant software to evaluate the proposed approach. Experimental results show that the proposed dynamic dispatching method improves the system efficiency in terms of mean delivery time, mean waiting time and so on. Meanwhile, the proposed dispatching method has a better comprehensive performance such as the robustness compared to conventional vehicle dispatching approaches.