Application of an ultraprecision milling machine based on friction-free drive concept to micromachining

摘要

The study deals with the development of an aerostatic servo motor on the basis of the friction-free drive concept and the application to 5-axis control ultraprecision milling machine. The aerostatic servo motor equipped with a high resolution optical encoder of 64 million pulses per rotation, enables a linear motion of 1 nm positioning and a rotational one of 0.00001 degree respectively. The ultraprecision milling machine makes it possible to manufacture ultraprecision microparts, together with a devised high speed air spindle unit and pseudo ball end mills.