Trioxane derivative as an acid amplifier exhibiting a non-linear organic reaction

摘要

2,4,6-Tris[2-(p-toluenesulfonyloxy)ethy]-1,3,5-trioxane was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist. [References: 9]