A hemispherical retarding field energy analyzer to characterize spatially and angularly extended electron beams

摘要

We have designed' and built a hemispherical retarding field energy analyzer in order to facilitate characterization of large area electron emitters (typically field emitter arrays with active areas up to 1 cm~2) with large angular aperture. A complete numerical model of the analyzer has been built, including perturbations due to secondary particles, in order to determine the analyzer performances. The analyzer energy resolution is better than 100 meV for an energy range up to 120 eV. The analyzer has a global field of view of 112° and allows measurements of the energy distribution of the beam as a function of the emission angle, as well as measurements of the beam intensity profile along any section of the beam. We have successfully used the analyzer to characterize the electron beam emitted by 1 cm~2 Mo microtips-based field emitter arrays.