P1 - FIFTH INTERNATIONAL SYMPOSIUM ON ENVIRONMENTAL ISSUES WITH MATERIALS AND PROCESSES FOR THE ELECTRONIC AND SEMICONDUCTORS INDUSTRIES

摘要

As semiconductor technology advances, new materials, tools, and processes are being introduced at an unprecedented rate. It is critical to identify and address the environmental, health, and safety (EHS) issues associated with these new processes as early on in development as possible. Furthermore, recent increases in environmental awareness, such as climate change and resource conservation, will have a significant effect on the process technologies used for electronics and semiconductor manufacturing. This symposium will focus on the EHS issues prevalent in these industries and the solutions developed to addres these issues. Potential topics include waste treatment, recycle and reclaim, emissions abatement, and alternative chemistries and processes. Some suggested process areas of focus are as follow: metallization, advanced CVD of low-k and high-k dielectric materials, CMP, wet and dry etch chemistries, wafer cleaning, etch chemistries, photolithography, circuit board manufacturing, plating and soldering processes, and encapsulation processes.