Concentric run-out error determination of rotary tables with an interferometric probe head

摘要

It is necessary to know the uncertainty input of the parasite influences for high-accuracy roundness measurements of ring gauges. One of the largest deviations is caused by the concentric run-out error of the utilized rotary table. An optical probe head basing on two integrated laser interferometers has a measurement resolution up to 20 pm. It was developed at the Institute for Process Measurement and Sensor Technology. It is an interesting experiment to use this optical probe head technology for the concentric run-out detection of rotary tables with air bearings. The investigations of this table show a maximal concentric run-out error of 537.5 nm. It was possible to determine this error with a reproducibility of 31.3 nm in maximum. This reproducibility contains not only the reproducibility in the measurement. It contains the concentric run-out error of the rotary table, too.