Application of a High-Resolution Laser-Speckle Strain Gauge for the Characterization of Thermomechanical Properties of Multilayer Systems

摘要

Nontactile strain measurements of materials with micrometer dimensions, as used in microelectronics and microsystems, are rapidly expanding fields in materials science. Mechanical properties of "micro-materials" can differ significantly from those determined from their bulk counterpart. To enhance the reliability of microsystems, materials testing in small dimensions is necessary. Optics-based methods circumventing surface marking or preparation therefore play an important role and open new testing potentials where standard testing techniques cannot be used.