Simple Analytic Formulas for Estimating the Parameters of the Positive Column of a Glow Discharge in Electronegative Gases

摘要

Simple analytic expressions are analyzed for the plasma of the positive column of low- and moderate-pressure discharges in the case of detachment by neutral particles. These relations make it possible to easily and rapidly estimate the parameters of spatial distributions of charged particle concentrations in this plasma, as well as its energy parameters. For the first time, the conditions for applicability of these relations are determined and their accuracy is estimated.