Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

摘要

The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF_6 or CCl_4 to nitrogen significantly increase the number of electrons in the energy range 2-6 eV which corresponds to the inverse part of the EEDF. In nitrogen with small admixtures of F_2 or NF_3, the EEDF differs slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules.