Computer simulation and analysis of technical characteristics of Thermomolecular micropumps

摘要

Thermomolecular micropumps operating without moving mechanical parts, differing in shape, but based on the same physical effect (thermal slip of a gas along nonuniformly heated walls) are investigated. The applicability of computer simulation methods and software in analysis of physical properties of various micropumps is demonstrated. As operation criteria, the pressure ratio produced by a pump in the steady-state operation regime and the geometry of the pump structure required for using the device in MEMS systems are employed. Functional capabilities of the pumps are studied numerically by computer simulation of the Boltzmann kinetic equation.