Using a monochromator to improve the resolution in TEM to below 0.5 A. Part I: Creating highly coherent monochromated illumination

摘要

Chromatic aberration limits the resolution in spherical-aberration corrected Transmission Electron Microscopy to approximately 0.7 A at 300 kV. The energy spread in the beam is the main contribution to the chromatic aberration. This spread can be reduced with a monochromator. Another limitation to the resolution in TEM can be the finite brightness of the source and the consequent partial spatial coherence of the illumination. This limitation becomes important when spherical aberration and/or defocus are present such as in uncorrected TEM or in focal-series reconstruction in TEM. We used a monochromator optimized for minimum brightness loss and a prototype 'high-brightness' gun, and obtained brightness after monochromation comparable to that of the standard Schottky FEG before monochromation. The images were acquired on the prototype TEAM 0.5 microscope, which was developed on a Titan platform by increasing its electrical and mechanical stability.