Nanoscale quantitative phase imaging using XOR-based X-ray differential interference contrast microscopy

摘要

We propose a quantitative x-ray phase imaging technique using previously demonstrated XOR objectives. The fabrication process of XOR is identical to that of a Fresnel zone-plate and as a result the same finest outermost zone width, thus spatial resolution, can be achieved. A series of phase shifts from 0 to 2π is implemented by shifting the relative position of the grating with respect to the zone-plate. Both qualitative differential interference contrast imaging and quantitative phase reconstruction are demonstrated. We expect this high-resolution quantitative x-ray phase imaging capability to further enhance the utility of existing x-ray microscopy facilities.