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Inline quality rating of multi-crystalline wafers based on photoluminescence images

机译:基于光致发光图像的多晶晶圆在线质量评级

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The quality assessment of multi-crystalline and high-performance multi-crystalline silicon wafers during incoming inspection of solar cell production requires a reproducible description of the relevant material defects and a classification scheme that is capable to rate as-cut wafers from unknown manufacturers. Both needs are addressed in this work. We introduce an image processing framework that allows the various types of crystallization-related defects visible in photoluminescence images to be detected quantitatively and thus enables a complete wafer description in terms of defects. The importance of different features within this defect characteristic is weighted by predicting the open-circuit voltage of solar cells with aluminum back-surface field as well as passivated emitter and rear cells with a stepwise extension of the model. The resulting robust classification scheme is successfully evaluated on a set of 7500 wafers, which represents the whole spectrum of material types and qualities that are currently available at the market. A comparison of defect signatures in high-performance multi-crystalline and standard multi-crystalline silicon materials underlines the relevance of additional features. As a result of this paper, we show that a regularized version of multi-linear regression models for quality prediction can optimize simpler linear models by adding selected features to the defect characteristic leading to mean absolute prediction errors of 2.2mV for solar cells with aluminum back-surface field and 2.9mV for passivated emitter and rear cells solar cells in a true blind test. Copyright (c) 2015 John Wiley & Sons, Ltd.
机译:在太阳能电池生产的来料检查过程中,对多晶和高性能多晶硅晶片的质量评估需要对相关材料缺陷进行可重复的描述,并能够对未知制造商的切割后晶片进行评级。这项工作都满足了这两个需求。我们引入了一种图像处理框架,该框架允许定量检测在光致发光图像中可见的各种类型的与结晶相关的缺陷,从而可以就缺陷进行完整的晶圆描述。通过预测具有铝背表面场的太阳能电池以及具有模型逐步扩展的钝化发射极和背面电池的开路电压,可以加权此缺陷特征内不同特征的重要性。由此产生的稳健的分类方案已在7500个晶片上成功进行了评估,该晶片代表了目前市场上可获得的全部材料类型和质量。高性能多晶硅和标准多晶硅材料中缺陷特征的比较强调了附加功能的重要性。作为本文的结果,我们表明用于质量预测的多线性回归模型的正则化版本可以通过将所选特征添加到缺陷特征中来优化更简单的线性模型,从而导致铝背太阳能电池的平均绝对预测误差为2.2mV在真正的盲测试中,钝化发射极和后电池太阳能电池的表面电场为2.9mV。版权所有(c)2015 John Wiley&Sons,Ltd.

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