Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process

摘要

With the advance of contemporary technology, high precision surface finishing techniques for optical glasses are of great concern and developing to meet the requirements of the effective industrialized processes. Not only the used tools but also process parameters have great influence on the surface roughness improvements. In this paper, surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process has been presented. For the same purpose, a tool for executing ultra precision polishing was designed and manufactured. Taguchi's experimental approach, an L-18 orthogonal array was employed to obtain the optimal process parameters. ANOVA analysis has also been carried out to determine the significant factors. It was observed that about a 98.33% improvement on surface roughness from (R-a) 0.360 mu m to (R-a) 0.006 mu m has been achieved. The experimental results show that a surface finished achieved can satisfy the requirements for optical-quality surface (R-a < 12 nm). In addition, the influence of significant factors on surface roughness improvement has been discussed in this study. (C) 2015 Elsevier Inc. All rights reserved.